Abstract: This paper summarizes the vortex oil-free vacuum pump technology development and status quo, including the development of vortex technology to vortex technology in various industries; vortex oil-free vacuum pump principle to vortex oil-free vacuum pump Manufacturing technology and technical indicators; scroll vortex vacuum pump from the development of all countries in the world to our country vortex vacuum pump development status of the vortex oil-free vacuum pump conditions have a systematic introduction. 1 Introduction The concept of vortex quite long ago, the early 20th century the world already has a vortex technology patents. However, because of the technical limitations at that time, the vortex mechanism could not be manufactured and the vortex concept was forgotten. The scroll mechanism was reintroduced in 1973 and the first model agency was created, making the practical application of this technology possible. Vortex institutions of high reliability, smooth operation, low noise, energy saving potential and great advantages immediately caused the refrigerator industry attention and urgent needs, greatly favored by the industry leader, was quickly put into industrial applications. Scroll compressor technology and products of well-known companies such as Trance, Hitachi and Copland have led the tide of practical application of vortex technology in the world, which has led to technological progress and product upgrading in many industries such as refrigerators and air conditioners. Today, the vortex technology has been promoted to the vacuum pump manufacturing industry from the initial application in the compressor industry, and has realized the practical application of the vortex cleaning vacuum obtaining technology without any oil, with a smoother operation, lower noise and more energy saving. People use the concept and principle of vortex to create a series of single-stage and two-stage vortex oil-free vacuum pump which has no pollution to vacuum application equipment and environment, and whose indexes such as pumping speed, life expectancy and energy consumption are superior to ordinary oil pump. In the early 90s of last century, the world's first scroll vacuum pump to market, scroll technology thus began as a new type of vacuum access technology is being promoted around the world. So far, the world's vortex vacuum pump manufacturer focused on the United States, Japan and Europe, Japan's Anest 1wata, the United States Varian, Germany Bush as the representative. Products include since 0.25L / S-1OL / S series of products, some 15L / S or more products are also pumping the pilot phase. 2 Features and Applications of 0-I free scroll vacuum pump Clean vacuum environment has always been the ideal vacuum environment pursued by scientists and enterprises. Since the beginning to create a vacuum environment, people try to use different means to achieve the effect of cleaning the vacuum. Today, clean vacuum equipment has been developed to a variety of products such as condensate pump, column race pump, claw pump, scroll pump and diaphragm pump. Among the existing oil-free vacuum pumps, the vortex oil-free vacuum pump has the characteristics of stable operation, low noise, energy saving, light weight and small volume as compared with other types of oil-free vacuum pumps and has been widely applied to the following scientific research And the production areas: ①semiconductor industry - thin film preparation equipment, semiconductor device packaging equipment; ② vacuum metallurgy industry - vacuum furnace, nanomaterials preparation equipment, vacuum testing equipment; ③ Scientific Instruments Industry - Synchrotron radiation beam lines, electron microscopes, Analysis and testing equipment; ④ medical equipment - dental equipment, dialysis machines; ⑤ biological products industry - material purification, pharmaceutical preparation; ⑥ packaging industry - food, pharmaceuticals, biological products and other packaging equipment. 3 vortex oil-free vacuum pump working principle, technical indicators and compared with the ordinary pump vortex scrollless oil-free vacuum pump is a scroll with one end connected to a plane one or several involute spiral form a scroll disc structure. A pair of scrolls consisting of a fixed scroll and an orbiting scroll form the basic suction mechanism for a scrollless oilless vacuum. For example, in a two-stage vortexless oil-free vacuum pump, there are two directions of a fixed scroll and a orbiting scroll between two scroll plates. Dynamic and fixed vortex scroll to form a relatively constant volume of crescent-shaped vacuum chamber so that gas suction from the suction port, the exhaust port discharge to complete the exhaust cycle. As we all know, oil-free scroll vacuum pump (Oil free scrolI vacuum pump) compared with the ordinary oil vacuum pump has significant features. Below the ordinary rotary vane vacuum pump, for example, to illustrate the difference: Table 1 vortex oil-free vacuum pump and ordinary direct-coupled rotary vane vacuum pump technical indicators of comparison Technical indicators Rotary vane vacuum pump vortex oil-free vacuum pumping speed (l / s ) 2.0,4.0,8 2.0,4.4,8.7 Extreme vacuum (Pa) 0.6 1.0 Service life (h) Overhaul interval 8000 10000 Cooling medium oil Air noise (dB) 75 60 Mass (kg) 70 41 Motor Number of Phases 3 1 Voltage (V) 220/380 220 Power (kw) 1.1 0.6 Revolutions (r / min) 1400 1437 4 Advantages of Vortex Oil Free Vacuum Pumps and Their Solutions for Users 4.1 Vortex Oil Free VACUUM PUMP EXCELLENT PERFORMANCE Vortex vacuum pumps have the main advantages of small gap, low leakage, high compression ratio, stable pumping speed over a wide range of working forces and wide working pressure range. Due to the continuous variation of the volume of the compression chamber Therefore, the change of driving torque is small, the change of power is small, the vibration noise is low, and the reliability is high. This is not available with other types of dry vacuum pumps. 4.2 vortex oil-free vacuum pump to solve the basis of pollution and vibration, common problems due to common rotary pump oil spills, noise, oil pollution, high energy consumption and vibration and other issues to the user adverse effects, such as the biological products industry and Oil vapor pollution in the semiconductor industry and process system return valve title. Vacuum coating equipment coating process, coating under 20 ~ 40Pa vacuum conditions, if the application of ordinary rotary vane vacuum pump as a pre-stage equipment will cause pollution on the coating process equipment, affecting the amount of film. The semiconductor wafer manufacturing process which uses the pump compared with the use of dry pump, the yield rate of 509l left the gap between the left and the oil mist emitted steam pollution of the environment. In the scientific instrumentation industry, especially in the analytical instrumentation industry, the use of a pump will adversely affect the test results. Large synchrotron radiation beam line mining up the drain with vortex oil-free vacuum pump as a front-stage vacuum pump role is quite obvious. In addition vortex oil-free vacuum pump consumption in addition to ordinary oil pump to the user to bring the environmental pollution and annoyance. 4.3 Vortex oil-free vacuum pump system manufacturing and operating costs to reduce the common rotary vane vacuum pump oil on the vacuum system to the oil pollution, the need to add cold trap in the extraction system to capture oil molecules; system operation process also need regular Cleaning degreasing; some need to regularly replace the vacuum pump oil. The first use of vortex oil-free vacuum pump does not need to add cold trap and the like oil catching mechanism, the second does not need to change the vacuum pump oil, the third vibration smaller, more stable operation, the fourth energy consumption is reduced, the fifth weight lighter, Six breakthrough in the use of the pump limits, the advantages of the vortex oil-free vacuum pump to become common rotary vane vacuum pump replacement products. 5 Conclusion Domestic semiconductor, electronics industry